TOK Joins CEA-Leti IMAGINE Program to Develop Multiple E-Beam Lithography Sub-20nm Resists and Processes

Date Announced: 17 Jan 2011

Japanese photoresist specialist joins three-year research project.

KAWASAKI, Japan, and GRENOBLE, France ­– Jan. 17, 2011 – TOK and CEA-Leti today announced that TOK will join the new industry/research multi-partner program IMAGINE that is developing maskless lithography for IC manufacturing.

The three-year project is led by CEA-Leti, a research center committed to creating and commercializing innovation in micro- and nanotechnologies, and also includes semiconductor manufacturers TSMC and STMicroelectronics. It is evaluating a maskless lithography infrastructure and the use of MAPPER Lithography tools for high throughput. The multiple e-beam-lithography program covers a global approach to the technology, including tool assessment, patterning and process integration, data handling, prototyping and cost analysis.

“TOK’s material development beyond the 20nm node covers a broad range of technology- platform and lithography-process candidates, such as EUVL, ML2, and DSA. The IMAGINE program at CEA-Leti, which focuses on multiple e-beam lithography, is a very attractive program especially for understanding the fundamental RLS (resolution, line edge roughness and sensitivity) issue in photoresist development,” said Kazufumi Sato, TOK R&D general manager. “TOK will contribute to the program by providing a materials perspective based on our deep knowledge of the electron-beam resist and recent discoveries from the EUV resist development.”

“The development of new chemically amplified resist platforms achieving resolution below 20nm with a line-edge roughness in the nanometer range is one of the main challenges for next-generation lithography,” said Serge Tedesco, CEA-Leti program manager. “We have already built a long and fruitful collaboration with TOK by working together at the introduction of e-beam lithography at the STMicroelectronics Crolles Line. We are very pleased to continue this relationship with a worldwide leader in resist technology, ensuring a boost for the IMAGINE program and reinforcing the semiconductor industry’s commitment to introduce ML2 in manufacturing.”

Source: CEA-Leti

Contact

E-mail: serge.tedesco@cea.fr

Web Site: www.cea.fr