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Date Announced: 07 Mar 2016
Yield enhancement is the most important success factor in IC manufacturing. Backside contamination (BSC) of wafers is a big problem, because it may impact the wafer flatness which may lead to yield loss.
Almost all processes in a wafer fab can cause backside contamination. One source for backside contamination is the wafer chuck. Chucks are used in various areas of the semiconductor industry: in lithographic processes, inspection steps, coating, 3D integration, wafer handling and during etching processes. Their purpose is to fix a wafer, to straighten it, to keep it at a certain temperature and to release it quickly without damaging it or causing contamination.
Berliner Glas designs and produces customized electrostatic and vacuum chucks. The chucks developed and manufactured by Berliner Glas already have been made as resistant as possible to particle contamination by using a special pin or mesa design. The contact area between the wafer and the chuck has been reduced down to 0.1%.
To find a way to further reduce backside contamination, the pins on a SiSiC vacuum chuck have been manufactured with different methods. Several tests were performed to investigate the behavior of the different pin properties in terms of added particle. Measurements were taken before and after the different manufacturing methods of the pins. The results are published in the white paper: “Perfecting Chucks: Wafer Backside Particle Reduction”, which can be downloaded from the Berliner Glas Website: http://www.berlinerglas.com/news/white-papers.
About Berliner Glas:
The BERLINER GLAS GROUP is one of the world’s leading providers of optical key components, assemblies and systems as well as high-quality refined technical glass. With more than 1,100 employees, BERLINER GLAS develops, produces and integrates optics, mechanics and electronics into innovative system solutions for its customers. As OEM partners from concept to volume production, the BERLINER GLAS GROUP companies serve innovative customers in various market segments – semiconductor industry, laser and space technology, medical technology, metrology and the display industry.
E-mail: info@berlinerglas.de
Web Site: www.berlinerglasgroup.com
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