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Jenoptik at SEMICON WEST 2010: Dedicated micro-optical solutions for Semiconductor & Flat Panel Display Equipment Industry

Date Announced: 12 Jul 2010

Jenoptik has expanded its process capabilities in CaF2 (single crystal Calcium Fluoride) for applications in the semiconductor market. These solutions, along with the full range of custom microoptics, will be presented in San Francisco (CA), USA.

Highly efficient microoptics from DUV to IR

Due to high transparency and excellent lifetime stability, CaF2 is the material of choice for excimer lasers used in the lithography market as well as other high power applications in the deep ultra violet (DUV). The Microoptics business unit of Jenoptik´s Optical Systems division strengthens its position as world leader in DUV microoptics by offering custom specific CaF2 microoptics.

The complete product range of CaF2 microoptics includes diffractive and refractive solutions such as gaussian homogenizers, refractive fly’s eye homogenizers, diffractive lenses, lens arrays for fill factor enhancement, as well as DOEs for mask inspection and illumination. Our capabilities are ideal for DUV applications in the semiconductor & flat panel display industry, which typically require excellent uniformity, efficiency and high power.

Due to our flexible technology base, the CaF2 microoptical solutions can be designed with significantly reduced complexity. Our refractive homogenizers and fly’s eye lens arrays can be designed with rectangular apertures, which reduces the number of required elements to homogenize an anamorphic or rectangular field. We can provide these solutions using substrates from 75-150 mm diameter and thicknesses from 0.5 – 6 mm thick.

Ask the experts and visit Jenoptik at Semicon West 2010, San Francisco from July 13 – 15, 2010 in South Hall, Booth 2413.


JENOPTIK I Optical Systems
JENOPTIK Optical Systems GmbH
Microoptics Business Unit
Goeschwitzer Strasse 25 205
07745 Jena I
Phone: +49 3641 65-2442
Fax +49 3641 65-2443

E-mail: microoptics.os@jenoptik.com

Web Site: www.jenoptik.com/os

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