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Date Announced: 26 Sep 2014
Chucks are used in various areas of the semiconductor industry: in lithographic processes, inspection steps, coating, 3D integration, wafer handling and during etching processes. Their purpose is to fix a wafer, to straighten it, to keep it at
a certain temperature and to release it quickly without damaging it or causing contamination. Clamping force and flatness are two important key factors of a chuck. All above mentioned applications lead to a broad range of specifications for the chuck – particularly with regard to clamping force and flatness. In addition,these characteristics are influenced by the operational environment, temperature, material and other physical aspects. Berliner Glas designs and produces customized electrostatic and vacuum chucks, that possess the ideal clamping force and flatness for the respective application. To do so, Berliner Glas has developed methods to model the effective clamping force based on specific material parameters as well as to simulate, test and evaluate optimized pin structures to create the suitable flatness. The white paper ‘Perfecting Chucks: Clamping Force and Flatness’ includes detailed information about the approach, measurement set up and the results. The white paper can be downloaded here.
About Berliner Glas:
The BERLINER GLAS GROUP (www.berlinerglas.com) is one of the world’s leading providers of optical key components, assemblies and systems as well as high-quality refined technical glass. With more than 1,100 employees, BERLINER GLAS develops, produces and integrates optics, mechanics and electronics into innovative system solutions for its customers. As OEM
partners from prototyping to volume production, the BERLINER GLAS GROUP companies serve innovative customers in various market segments - semiconductor industry, medical technology, metrology, laser and space technology, analytics, defense and the display industry.
E-mail: photonics@berlinerglas.de
Web Site: www.berlinerglas.com
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