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"Intelligent" Coating systems make new thin film processes possible

Date Announced: 27 Jul 2012

Evatec is introducing "intelligent" coating systems with real time process re-optimisation to enable the most demanding optical coatings to be produced reliably and at viable costs.

The coating system will now be able to check the optical performance of the coating stack against the theoretical after each layer is deposited – "in situ" and in real time - and automatically adjust the remaining process layers correcting even very small errors to ensure the overall optical performance of the final stack matches the original design. Production tolerances will be tighter and yields improved resulting in significant reduction in production costs for complex coatings and making new processes viable in mass production. With the benefits of "in-situ" monitoring, coating batches which may have failed due to unforeseen factory or plant errors mid-process can even be recovered.

The system uses broadband optical monitoring combined with proprietary software and can be run on Evatec's BAK Evaporator or MSP Sputter platforms.

For further details please visit the Optics Toolbox page

Contact

Issued for and on behalf of Evatec Ltd, Lochrietstrasse 14, Flums, CH 8890, Switzerland, 27th July 2012

E-mail: allan.jaunzens@evatecnet.com

Web Site: www.evatecnet.com

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