 |
| ASML's Frits van Hout says that it is no longer a question of "if" EUV lithography will be introduced, but "when". At present, logic customers are slated to begin ramping up to production volumes after receiving upgraded tools in mid-2015, with commercial chip making set for 2016 onwards. Credit: ASML. |
| © 2024 SPIE Europe |
|
