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| Hard road: ASML's EUV roadmap indicates the need to reach a source output power of 80W in 2014, rising to 125W to support initial volume production at a throughput of 70 wafers per hour in 2015. ASML's CEO Peter Wennink believes that too much emphasis may have been placed on source power - and that the throughput achieved with the EUV source represents the ultimate metric with which to judge its technology development. Source: ASML. |
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