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| RGB camera measurement (100x magnification) of an array of waveguides with alternating 5 left-side-open-aperture and 5 right-side-open-aperture (the others being occluded by TiN) waveguides at a 1-micron pitch. Yellow light exits at the right part of the waveguide, whereas the blue exits at the left. The wafer is illuminated using plane wave white light. Credit: imec. |
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