Optics.org
daily coverage of the optics & photonics industry and the markets that it serves
Menu
EUV installed at IMEC
ASML's NXE:3100 tool on its way to imec's Leuven site in Belgium. This pre-production EUV scanner features a Cymer source; ASML is expected to take delivery of a 100W Gigaphoton source later this year. Credit: imec.
Copyright © 2019 SPIE EuropeDesigned by Kestrel Web Services