Accurion GmbH

Accurion specializes in precision equipment for thin film characterization and active vibration isolation.

Imaging ellipsometry allows the precise measurement of optical properties and layer thicknesses down to 0.1 nm on structures with a lateral resolution down to 1 µm. Application fields for imaging ellipsometry are 2D materials, graphene, MEMS, polymers, silanization, metamaterials etc. Direct ellipsometric contrast images provide a fast detection of defects and contaminations. Within the field of quality control our referenced spectroscopic ellipsometer (RSE) represents a tool combining high speed (200 spectra per second) with the accuracy of an ellipsometric measurement.
Accurions active vibration isolation systems for small and large scale instrumentation ensure the highest stability and accuracy for your measurement results.