 |
 |
From Nano to Infinity
scia Systems is the technology leader in thin-film process equipment based on advanced ion beam and plasma technologies. The systems are used for coating, etching, and cleaning processes with nanometer accuracy and have been successfully implemented in various high-tech industries worldwide, including microelectronics, MEMS, and precision optics industries. For more information, please visit our website at https://www.scia-systems.com.
Expertise in Thin-Film Processing
scia Systems provides precise surface processing equipment based on advanced ion beam and plasma technologies. The systems are applicable for coating, etching, and cleaning processes, especially in the MEMS, microelectronics, and precision optics industries.
Process equipment made by scia Systems is flexible and modular in design, and can be easily configured for research applications and high-volume production. It suits silicon wafer-based substrate sizes, smaller samples on carriers, and optical substrates with up to 3 m diameter.
Advanced ion beam & plasma process equipment for
| © 2025 SPIE Europe |
|
