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micro resist technology GmbH

micro resist technology GmbH is a leading company for the development and production of innovative photoresists, special polymers as well as ancillaries for micro- and nanolithography and micro-optical applications. Our products are applied in key technologies like microsystems technologies, microelectronics, micro and nano photonics micro and nano engineering as well as in Life Sciences.

Since the company foundation in 1993, we produce as a medium sized chemical enterprise highly specialized materials at our site in Berlin. Serving the global high-tech markets our products enable processes like UV, Laser, X-ray, and e-beam lithography, nanoimprint lithography as well as associated patterning technologies. We are committed to advance our product portfolio by continuously innovating new products as well as preparing tailored solutions for our customer’s technological demands in highest quality. Since 1997 we are certified after DIN EN ISO 9001 (Quality Management System) and since 2011 after DIN EN ISO 14001  (Environment Management System).

Our worldwide customers are innovative manufacturing companies whose value creation is significantly based on micro and nano fabrication. Furthermore, leading research institutes and top level universities are our clients which we support already in the early phase of their technology development. All our customers appreciate our expertise for photoresists, polymers, photo polymers as well as our comprehensive technological consultations with a holistically view on the lithographic interaction between material and processes. It is our aim to have satisfied and enthusiastic customers who are successful with their individual processes. As a reliable and experienced partner we also offer product-supporting lithographic services.

Our portfolio of in-house manufactured products is complemented by a strategic distributorship of associated products from supplementary international manufacturers*. We operate as a high service distributor to the European small and medium sized businesses and offer a wide range of materials from one source which can be used for conventional technologies as well as for advanced processes in micro and nano patterning.

* DOW Electronic Materials, MicroChem Corp., DuPont

micro resist technology GmbH
Koepenicker Str. 325
Tel: +49 30 64 16 70 100
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