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Fully resolved actinic images and intensity lineouts of elbow patterns with (a) 80, (b) 100, (c) 120, and (d) 140nm half-pitch. The images were obtained with 20s exposures and around 610x magnification.

The intensity lineouts were obtained by averaging five rows of pixels (around 100nm on the mask) across the gratings.

Image credit: Fernando Brizuela

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