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| Clockwise from left: (a) SEM image of a fabricated HCG-integrated VCSEL, where the grating is aligned with the centre of the device mesa; (b) close-up SEM image of the freely suspended grating, where a stress-relief trench is used to eliminate the buckling of the grating; (c) zoomed-in SEM image of the fabricated individual grating stripes. |
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