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Closed-Loop XYZ-Piezo-Scanner Provides 25 Picometers Resolution from PI

14 Aug 2007

March 2007 - PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment introduces a new ultra-high-resolution positioning & scanning system.

The minute P-363 PicoCube®, together with its ultra-low noise E-536 driver / controller, provide significantly higher resolution and positional stability than previous multi-axis scanning stages. More information on the controller and a graph showing resolution data is available here: http://www.physikinstrumente.com/en/news/fullnews.php?newsid=117 Features & Advantages:

  • High-Speed XYZ Scanner for AFM / SPM & Manipulation Tool for Nanotechnology
  • Custom, High-Stiffness Shear Piezo Drives Provide up to 10 kHz Resonant Frequency for Faster Response and Higher Scanning Performance
  • Ultra-Low-Noise Controller: 25 Picometers (0.025 nm) Resolution
  • Capacitive Feedback for Exceptional Precision and Linearity
  • Parallel Metrology for Better Multi-Axis Accuracy
  • Small & Rugged Design with Titanium Case
  • Vacuum Compatible
Typical Applications: AFM (Atomic Force Microscopy), SPM (Scanning Probe Microscopy) and Nanomanipulation, Bio-Technology, Nanotechnology, Nano-Imprint, Semiconductor & Data-Storage Test Equipment. Why are PicoCube® Systems Superior? PicoCube® systems were designed to overcome the limitations of open-loop piezo-tube based scanners which provide high resolution motion but poor linearity and trajectory guidance. The compact PicoCube® is based on exceptionally robust, high-stiffness piezo drives rather than tubes and employs non-contact, direct-measuring, parallel-metrology capacitive sensors for position feedback. The low-inertia drives allow for a resonant frequency of 10 kHz, important for high speed scanning applications. Why Parallel Metrology? Parallel metrology can “see” all controlled degrees of freedom simultaneously and compensate for off-axis motion in real time. The benefits are a reduction of runout and off-axis errors, straighter multi-axis motion and improved repeatability. Controller The new ultra-low-noise E-536 closed-loop controller provides unprecedented positional stability and can be controlled with analog or digital signals. LabView Drivers are available.

CONTACT DETAILS
PI (Physik Instrumente) - Nanopositioning, Micropositioning and Piezo Technology
Nanopositioning Systems
Auf der Römerstraße 1
Karlsruhe
D - 76228
Germany
Tel: +49 (0) 721 4846-0
Fax: +49 (0) 721 4846-100
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