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17 Jun 2002
Lambda Physik has delivered what it says is the market's first 4 kHz, 193 nm laser and has announced plans to introduce an ultra line narrowed litho laser in the second quarter of 2001.
The Novaline A4020 was shipped to a step-and-scan manufacturer for imaging sub-100 nm line widths. The device is an argon fluoride laser for semiconductor chip production.
With 40 W, 10 mJ of energy and a repetition rate of 4 kHz, the A4020 laser offers the industry's lowest cost of ownership, says Lambda Physik. It has a partially narrowed bandwidth, of less than 25 pm at a 4 kHz repetition rate, for increased wafer throughput, and superior energy control for increased wafer yields. Design improvements to the laser-discharge unit, power supply and optical modules provide typical dose-control values of less than 0.2%.
The company will introduce an ultra line narrowed laser, the NovaLine A4005, for shipment in the second quarter of 2001. This device will feature full ultra-line-narrowing capabilities with a spectral bandwidth of less than 0.35 pm; FWHM to support imaging capability in next-generation step-and-scan tools, which require lens designs that have a numerical aperture of up to 0.78. Lambda Physik is forecast to ship more than 100 orders for its ArF 4000 series lasers this year.
Lambda Physik's president, Dirk Basting, says that the company's ability to be first in the 4 kHz market-place was significant. "Lambda Physik has not only made great strides to remain the technology leader in ArF, but has also been successful at reducing the cost of ownership by 40% over our previous ArF models. It is this combination of cost-effective technology and customer support that makes the company a leader in this industry," he said.
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