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10 Apr 2006
FAB demand boosts business for optical inspection systems
US Optical metrology supplier Zygo has announced that in the four months to April 2006, the company received orders totalling $13.0 million for its flat panel display inspection systems.
The orders came from multiple customers on Gen4 through Gen7.5 fabs, and support both new construction and process improvements on existing installations. The majority of the units are expected to be sold and shipped during Zygo's 2007 fiscal year.
"We are pleased with the acceptance of our One Shot inspection and process control solutions," said Brian Monti, VP and general manager of Zygo's Display Solutions Division.
"The expanded metrology and inspection capabilities we have built into our second-generation tool are providing flat panel manufacturers with new capabilities to address process problems inline during the manufacturing process."
The One Shot process control tools provide simultaneous measurement of color filter and TFT topography and critical lateral dimensions. This inspection information is then used to control the one-drop-fill liquid-crystal process.
The expanded second generation tool provides film measurement and analysis of color filter and ITO structures critical in the control of potential optical defects such as MURA (dark blobs or areas on the display).
Zygo is a worldwide supplier of optical metrology instruments, precision optics, and electro-optical design and manufacturing services, typically serving customers in the semiconductor capital equipment and industrial markets.
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