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TuiLaser and Cymer team up to develop excimer sources

17 Jun 2002

Excimer-laser manufacturer TuiLaser of Munich, Germany, has entered into a development agreement with Cymer of San Diego, California, in the US. Under the terms of the agreement, the companies will exploit their combined laser technology, and manufacturing and process assets to explore a wider range of applications for excimer laser sources.

TuiLaser already supplies lasers for medical, industrial and scientific applications and Cymer will fund R&D at TuiLaser's Munich facility, which aims to combine the company's compact technology with Cymer's expertise in photolithography. This would extend Cymer's excimer prowess beyond photolithography into other semiconductor applications.

Cymer says that it recognizes the high quality and reliable nature of TuiLaser's sources. Cymer's excimer lasers are more complex and the company hopes that, by pooling technological resources, new applications and products will open up for both companies. Cymer expects to introduce a number of new products within the next two years.

Martin Hohla, chief financial officer of TuiLaser, said: "TuiLaser is delighted to be cooperating with the recognized world leader in excimer lasers for the semiconductor industry. Each company will provide the other with a type of cross-pollination, which will help to generate new ideas and speed-up the development of new products, while reducing production costs and time to market. Although both companies currently sell reliable products whose components have a long production life, we believe that there are ways that we can help each other achieve longer life and greater reliability."

HÜBNER PhotonicsTRIOPTICS GmbHOptikos Corporation Iridian Spectral TechnologiesLaCroix Precision OpticsHyperion OpticsECOPTIK
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