17 Jun 2002
Ibsen of Copenhagen, Denmark, has manufactured the largest commercially available phase mask. It has a grating size of 4 x 4 inch for the replication of gratings.
"Our focus on building state-of-the art holographic set-ups is enabling us to manufacture large phase masks with unsurpassed uniformity," said Kristian Buchwald, product manager. "We are producing gratings down to 200nm period with a period accuracy of 0.01nm."
The 4 x 4 inch phase mask is for a mask aligner for replication of gratings into semiconductor materials such as indium phosphide.