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Phase masks reach four-inch size

17 Jun 2002

Ibsen of Copenhagen, Denmark, has manufactured the largest commercially available phase mask. It has a grating size of 4 x 4 inch for the replication of gratings.

"Our focus on building state-of-the art holographic set-ups is enabling us to manufacture large phase masks with unsurpassed uniformity," said Kristian Buchwald, product manager. "We are producing gratings down to 200nm period with a period accuracy of 0.01nm."

The 4 x 4 inch phase mask is for a mask aligner for replication of gratings into semiconductor materials such as indium phosphide.

  • Story courtesy of Opto & Laser Europe magazine.

  • IBSEN has announced plans to move into new corporate headquarters and to establish more than 1000 square-meters of state-of-the-art cleanroom facilities. It expects to occupy the new site, in Farum, just north of Copenhagen city center, from June 2000.

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