OptiCentric® Max UP

20 Sep 2012

The Ultimate Solution for Alignment, Assembly and Final Inspection of Microlithography Optics

• Ultra-accurate measurement of centration error
• All granite, all air-bearing construction provides unrivaled accuracy
• Optional - automated piezoelectric submicron alignment unit, lens center thickness and air spacing measurement
• Designed for microlithography and space optics with a diameter up to 800mm, 2.000mm height and 1.500kg weight