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Photonics West
EVG's 'Hercules' NIL tool
EV Group's "Hercules" NIL track system is said to provide a complete, dedicated UV-NIL solution that is ideally suited for high-volume manufacturing of emerging photonic devices. It combines cleaning, resist coating and baking pre-processing steps with EVG's proprietary "SmartNIL" large-area nanoimprint lithography process in a single platform. Photo: PRNewsFoto/EV Group.
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