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Vary Kinds of sputtering target/ vaporation material(ni,cr,ti,al,b,mo,nb,ta,si,ti-zr,al-si,cr-si,ni-cr-si,ti-al,sio2,etc metal and alloy target),MgF2,YF3,YbF3,CaF2,liF,SrF2,CeF2,PbF2,Na3AlF6,LaAlO3,ErF3,NdF3