S onix - High-speed 3D optical sensor for in-line applications

12 Jan 2017

The S onix is a new and ultra-compact surface metrology system that addresses the increasing need for outright speed (high-throughput) for 3D optical profiling for in-line process measurement and process control tasks. It has been specifically designed for surface measurement applications requiring fast, non-invasive assessment of the 3D micro- and nanogeometry of technical surfaces – including roughness, texture, structuring and thickness measurements – and with vertical resolution down to 1nm.

To achieve this performance, the S onix sensor head features a single measurement technique (interferometry – VSI), but combines this with special measurement algorithms and a high-speed VGA-resolution camera ideally suited to imaging fringes at high frame rates. The result is a system capable of performing high-resolution surface metrology measurements up to 7x faster than comparable systems, making it the fastest industry-capable system available today.

The S onix comes equipped with a single, white, long-lifetime LED light source, a high-speed camera (up to 350 fps) and a single, application-specific objective. There are no moving parts in the sensor head, thus providing for long-term stability, accurate measurement repeatability and a very long lifetime.

Small size and low weight make designing for integration easy. Able to be mounted in any orientation, S onix can be positioned as the application dictates, making it perfectly adaptable for both in-line production and robot-mounted sensing applications. Typical application sectors include automotive, aerospace, laser marking, LCD, microelectronics, micromanufacturing, paper coating, semiconductor and tooling.

The newly developed software interface, SensoSCAN 6, offers an even more intuitive interface as well as compatibility with current surface measurement benchmarks (such as ISO standards). SensoSCAN also includes customizable tool features and new and powerful analysis algorithms that have been especially designed for automated in-line process applications – all easily accessible system-wide using the provided SDK.

Sensofar’s in-line metrology sensor systems represent the culmination of more than 15 years of experience in the development of surface metrology systems. They have been designed right from the outset to be integrated into the harshest manufacturing environments. Compact, lightweight, and with flexible mounting options, the S onix sensor puts high-performance surface metrology right where you need it – in the application.

Sensofar will demo the new system at Photonics West 2017 (San Francisco, USA – Booth #2536 South Hall).