18 Sep 2006 ARO Introduces Standard Excimer Laser Resonator Optics Alpine Research Optics (ARO, Boulder, CO) has introduced a new series of off-the-shelf intracavity resonator optics for excimer lasers. Specifically, these are rear high reflectors and uncoated output couplers for use with ArF (193 nm), KrF (248 nm) and XeCl (308 nm) excimer lasers. These standard products offer the convenience of in-stock availability together with field proven performance in terms of damage threshold, mechanical durability and pulse-count lifetime.
Both rear mirrors and output couplers are offered in 38.1 mm diameter MgF2 substrates. These optics are specified to have λ/10 flatness and λ/8 wavefront distortion on transmission (at 633 nm), and a surface quality of 10-5. In addition to this standard product, ARO can readily produce other excimer laser resonator optics over a wide range of size, shape, substrate material, surface specifications and performance characteristics.
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