Hybrid Nanoprecision Linear Stage Provides 100 mm Travel, 2 nm Resolution Nov 27, 2007

Auburn, MA, PI (Physik Instrumente) L.P., a leading manufacturer of nanopositioning and precision motion-control equipment for nanotechnology, photonics, semiconductor and life science applications, offers the M-511.HD hybrid nanopositioning translation stage. The new hybrid system overcomes the limitations of conventional precision positioning systems by combining the well-known piezo-flexure-drive advantages of unlimited resolution & rapid response with the long travel ranges and high holding forces of a servo-motor / ballscrew arrangement.

Watch Hybrid Drive Animation at:
http://www.physikinstrumente.com/en/news/fullnews.php?newsid=100

Typical Applications
Nano-Metrology, Surface Inspection, Microscopy, Laser Technology, Interferometry

Features & Advantages

• Combines Advantages of Piezo-Flexure Drives & DC-Servo / Ballscrew Drives
  
• Long Travel Ranges to 100 mm
  
• 2 Nanometer Linear Encoder Resolution
  
• Reliable Execution of Nanometer Level Increments
  
• Millisecond Settling Time to Nanometer Accuracy
  
• Active Compensation of Stick/Slip During Startup and Settling
  
• Active Backlash Compensation
  
• Excellent Velocity Control
  
• 100 kg Load Capacity
  
• High Holding Forces with Minimum Power Consumption

Hybrid Controller Technology is Key to Success
The highly specialized C-702 Hybrid Nanopositioning Controller reads the stage position from an integrated, 2 nm resolution linear encoder and continuously actuates both the piezoelectric and servo motor drives in a way to provide the best possible overall performance. Due to its high stiffness and instantaneous, sub-millisecond response, the integrated piezo flexure drive provides active stick/slip compensation during startup and settling. It also improves velocity control and is the key to achieving consistent and repeatable nanometer level positioning increments.
Never Miss a Count: Novel High-Bandwidth Encoder Interface
The C-702 Hybrid controller is equipped with a novel, high-speed encoder interface and can handle encoder count rates of 100 million pulses per second, without missing a single count. Thanks to its real-time operating system, the intricacies of the hybrid drive are completely transparent to the user. Interface to the host computer is via TCP/IP or RS-232; this interface makes it possible to operate and monitor the system over any TCP/IP-compatible network (intranet/internet).

A hybrid vertical Z-Stage is also available.

About PI
PI, a global, ISO 9001 certified market leader in the field of nanopositioning technology, has been developing and manufacturing standard, custom and OEM products with piezo and motor drives for 35+ years. PI is present worldwide with eight subsidiaries and total staff of 400+.

More Information:

http://www.physikinstrumente.com/en/products/prdetail.php?sortnr=702150

Watch Hybrid Drive Animation at:
http://www.physikinstrumente.com/en/news/fullnews.php?newsid=100

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